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Offers a complete description of the theory and technology of thin film deposition. This book offers a broad perspective, and gives readers the tools to objectively evaluate and choose the appropriate thin film process for a specific application. It also includes a list of symbols and an extensive index.
Les mer
Thin Film Technology.Gas Kinetics.Vacuum Technology.Evaporation.Deposition.Epitaxy.Chemical Vapor Deposition.High-Energy Techniques.Plasma Processes.Film Characterization.
Produktdetaljer
ISBN
9780070585027
Publisert
1995-04-30
Utgiver
Vendor
McGraw-Hill Professional
Vekt
998 gr
Høyde
224 mm
Bredde
155 mm
Dybde
41 mm
Aldersnivå
P, 06
Språk
Product language
Engelsk
Format
Product format
Innbundet
Antall sider
616
Forfatter