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Offers a complete description of the theory and technology of thin film deposition. This book offers a broad perspective, and gives readers the tools to objectively evaluate and choose the appropriate thin film process for a specific application. It also includes a list of symbols and an extensive index.
Les mer
Thin Film Technology.Gas Kinetics.Vacuum Technology.Evaporation.Deposition.Epitaxy.Chemical Vapor Deposition.High-Energy Techniques.Plasma Processes.Film Characterization.

Produktdetaljer

ISBN
9780070585027
Publisert
1995-04-30
Utgiver
Vendor
McGraw-Hill Professional
Vekt
998 gr
Høyde
224 mm
Bredde
155 mm
Dybde
41 mm
Aldersnivå
P, 06
Språk
Product language
Engelsk
Format
Product format
Innbundet
Antall sider
616

Forfatter

Om bidragsyterne

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