Chemical-Mechanical Polishing of Low Dielectric Constant Polymers and Organosilicate Glasses Fundamental Mechanisms and Application to IC Interconnect Technology Borst, Christopher Lyle Innbundet / 2002 / Engelsk
Chemical-Mechanical Polishing of Low Dielectric Constant Polymers and Organosilicate Glasses Fundamental Mechanisms and Application to IC Interconnect Technology Borst, Christopher Lyle Heftet / 2014 / Engelsk
